Hamamatsu to acquire UV light-source maker Energetiq Technology
source：LaserFocusWorld
release：Nick
keywords： UV light; Hamamatsu Photonics; Energetiq Technology
Time：2017-09-23
There has been a growing demand for light sources with high brightness in the ultraviolet (UV) region. With high brightness sources, semiconductor wafers can be quickly and more accurately inspected for properties such as thickness and pattern accuracy. As thinner design rules for semiconductors are implemented, there will be a significant demand for ultra-short wavelength EUV light sources for inspection and metrology in support of EUV photolithography. Energetiq's LDLS products and EUV light sources have the required brightness for these applications.
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